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  • Spin Coater System

     

    • Wafer cassette loader: 8˝(12˝) & elevator cassette detection by sensor
    • Wafer guide rail unit
    • Wafer transfer robot unit servo motor driven, wafer pick up by gripper
    • Wafer pick & place robot unit dual arm, servo motor driver, vacuum picker
    • Spin coater unit 1 ~ 1500 rpm, dual precision dispenser
    • Cycle time: 9 secs/wafer

     

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