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[ENG] HBM

Die Transfer (Recon) | GDRS-1000_FA

ITEM

DESCRIPTION

Feeding direction

Left to right

Material

400mm Ring frame / Tape (Roll)

Loader

Wafer LD_MAC (Multiple Application Carrier)  
Ring Frame LD(Manual)

Die(Package) Vision

Mapping & Top Vision
1D & 2D Barcode Reading
Bonding Accuracy Check

Die(Package) Handling

Gyro type Auto Tilt 보정

Tape Mount Accuracy

XY±1mm

Bonding Accuracy

<±15um @ 3Sigma

Unloader

MAC (Multiple Application Carrier)

Inspection

Mount Accuracy, Tape유무, Void, 울림 등

Sensing(FDC)

Tape Tension, Chamber 압력, Picker Z-Speed/Position

Interface

SECS/GEM, FDC, RMS - optional

Foot print(mm)

About 4,700 X 3,060 X 2,150mm (L x D x H)

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